Reticle handling
GM200M Manual Reticle Pod Opener
Manual SMIF reticle pod opening without an electrical supply.
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Product reference image. Configuration confirmed on enquiry.
Reticle handling
GM200A Automatic Reticle Pod Opener
Automatic opening of SMIF reticle pods with selectable RSP150 or RSP200 configuration.
Configuration & availability confirmed on enquiry
Select the pod configuration before ordering; RSP150 and RSP200 versions are not interchangeable.
Product information
Reference specifications.
Specifications are reference information; available configurations, performance and lead time are confirmed in your quotation.
| Dimensions | 535 × 420 × 915 mm |
|---|---|
| Power | 220 V |
| Pod compatibility | RSP200 OR RSP150; select one, not interchangeable |
| Torque detection | Stops automatically on abnormal opening/closing torque |
| Options | Obstacle/pinch protection; mask-protrusion detection; SECS/GEM remote control |
Reference information: 2025-09. Final specifications are confirmed in the quotation. Ask a technical question ↗
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